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ASM 03-330690D01 Serial Expansion Interface Board Rev C ASM Epsilon 3200 works

Asyst 12000-67 Robot AXYS Model 21 Robot ASM Epsilon 3200 used working

MKS 153D-20-40-2 Throttle Valve ASM Epsilon 3200 Wafer Transfer Module working

03-141884-01 03-320460D01 ASM Epsilon 3200 MFC I F Board 11 Circuit Board REV D

Vero Monovolt PK60-III CE/PF Power Supply 116-010074H 5V/12A Epsilon 3200 works

MKS Assembly GBR1B24CR1 ASM Epsilon 3200 working

Gesout-3 ASM Epsilon 3200 Circuit Board 03-322711A04 REV D working

Cole-Parmer HC205S-020 Spring Loaded Flow Meter 6000 PSI ASM Epsilon 3200 works

STEC Mass Flow Controller SEC-4500M H2 10 SLM ASM Epsilon 3200 Process Module

Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A04 REV C working

ASM Epitaxy Auxiliary Interface Circuit Board 03-322678C02 ASM Epsilon 3200

Genmark Wafer Transfer Robot ASM Epsilon 3200 Wafer Transfer Module used working

Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A03 REV C working

Edwards NGU078000P Vacuum Switch Box 6XPDM ASM Epsilon 3200 used working

IMC 04320-BT5340V-6 Blower Reactor Cooling Fan 46-106737U33 Epsilon 3200 works

Gespac 8720 GESINP-2A PCB 03-322710A02 Rev B ASM Epsilon 3200 used working

Vero Monovolt PK60-III Power Supply 116-010065J 15V 4A ASM Epsilon 3200 working

03-320142D03 03-188639D01 ASM Epsilon 3200 EV Interface Pneumatic Block

Vero Monovolt PK120 Power Supply 116-010081B 5V 20A ASM Epsilon 3200 working

Gesdac-2B-9821 ASM Epsilon 3200 Circuit Board 03-322712A02 REV C working

VAT 03112-LH24-ABG1 Slit Valve A-510093 ASM Epsilon 3200 working

Vero 116-010064A Monovolt PK60-III CE Power Supply 12V/5A ASM Epsilon 3200 works

ASM Epsilon 3200 Front End Interface used working

Vero 116-010084D Monovolt PK120 Power Supply 24V/5A ASM Epsilon 3200 used workis

Genmark ELVH030413-E1 Robot ASM Epsilon 3200 working

Asyst Controller 9700-5819-01 ASM Epsilon 3200 Etcher working

MKS 627B-15968 Baratron Pressure Transducer 1 TORR ASM Epsilon 3200 used working

Gespac 8720 GESINP-2A PCB 03-322710A03 Rev B ASM Epsilon 3200 used working

Gespac 9310 GESADC-12A PCB 03-323114A03 Rev C ASM Epsilon 3200 used working

STEC Mass Flow Controller SEC-4400M 2%CH3SiH3/H2 300 SCCM ASM Epsilon 3200

Gespac 9821 GESDAC-2B PCB 03-322712A03 Rev D ASM Epsilon 3200 used working

Precise Sensors 4861-65-GA-RM Pressure Transducer Lot of 11 working

Gespac 9821 GESDAC-2B PCB 03-322712A02 Rev D ASM Epsilon 3200 used working

Gespac 8720 GESINP-2A PCB 03-322710A04 Rev B ASM Epsilon 3200 used working

Gespac 9505 GESOUT-3 PCB 03-322711A02 Rev D ASM Epsilon 3200 used working

ACMA ASMA005 Computer 1031-864-01 Rev. B ASM Epsilon 3200 used working

SMV050581 Genmark Robot ASM Epsilon 3200 working

Gespac 9821 GESDAC-2B PCB 03-322712A04 Rev D ASM Epsilon 3200 used working

ASM 03-320460D01 MFC I/F Board PCB Rev D ASM Epsilon 3200 used working

STEC SEC-4400M Mass Flow Controller 1%GeH4/H2 500 SCCM working

ACMA 1031-864-01 Computer ASMA005 ASM Epsilon 3200 Wafer Transfer Module Rev C

Gespac 8915 GESCIO-1 PCB 03-323820A01 Rev E ASM Epsilon 3200 used working

Gespac 9505 GESOUT-3 PCB 03-322711A01 Rev D ASM Epsilon 3200 used working

ASM 03-141884-01 MFC Interface BD II PCB Rev A ASM Epsilon 3200 used working

STEC SEC-4600M Mass Flow Controller H2 100 SLM ASM Epsilon 3200

Genmark ELVH010657-EL2 Robot 95033E004B ASM Epsilon 3200 working

03-320142D03 ASM Epsilon 3200 EV Interface Pneumatic Block Circuit Board REV G

DC Interlock ASM Epsilon 3200 Circuit Board 03-140220-01 REV B working

ASM 03-140485-01 System Interface Board II Rev D ASM Epsilon 3200 used working

Gespac 9310 GESADC-12A PCB 03-323114A02 Rev C ASM Epsilon 3200 used working

03-188692D01 ASM Epsilon 3200 HW INTRL E3000 Circuit Board REV C working

STEC SEC-4400M Mass Flow Controller H2 5 SLM ASM Epsilon 3200

Edwards NRB086000 Helios Gas Abatement Unit ASM Epsilon 3200 used working

Asyst 9700-5819-01 Controller Rev. 005 ASM Epsilon 3200 FEI used working

03-141171-01 ASM Epsilon 3200 Vacuum Controls I F Board PCB REV B working

Gespac 9505 GESOUT-3 PCB 03-322711A03 Rev D ASM Epsilon 3200 used working

MKS GBROR InSitu Flow Verifier Controller GBR1B24CR1 123714-G1 20000 sccm workin

Asyst 9700-5819-01 3 Channel Controller CMS II Rev 4 ASM Epsilon 3200 used works

Asyst 9700-5888-01 3 Channel Controller Rev A ASM Epsilon 3200 used working

ASM 03-189611-01 Vacuum Controls I/F Board Rev A ASM Epsilon 3200 used working

Swagelok SS-DLV51-VCR4 Manual Valve 1/4" Lot of 9 works

Asyst Power Distribution Center 9700-6209-01 ASM Epsilon 3200 FEI used working

IMC 04320-BT5340V-5 Blower Reactor Cooling Fan 46-106737U32 Epsilon 3200 works

Asyst Pre Aligner Model 5 05050-017 ASM Epsilon 3200 Etcher working

ASM 03-188692D01 Assy HW Intrl E3000 PCB Rev D ASM Epsilon 3200 used working

MT1800-TR-ASM Mitsutech Touch Screen ASM Epsilon 3200 Wafer Transfer Module work

VAT 07512-UA24-ADA1 Atmospheric Door Slit Valve ASM Epsilon 3200 used working

NTI Nodemux KVM Switch ST-4U-TS-NBS ASM Epsilon 3200 used working

ASM 03-141171-01 TM I/F BD PCB ASM 3200 Epsilon Wafer Transfer Module working

IMC 04320-BT5340V-5 Blower Reactor Cooling Fan 46-106737A32 Epsilon 3200 works

ASM 03-188692D01 Assy HW Intrl E3000 PCB Rev B ASM Epsilon 3200 used working

ACMA ASMA003 Computer 54-125495A02 Rev. C ASM Epsilon 3200 used working

Genmark EL1 Wafer Cassette Robot ASM Epsilon 3200 Wafer Transfer Module working

VAT 07512-UA24-ADA1 Atmospheric Door Slit Valve Epsilon 3200 missing DE-9 plug

Asyst CPU 6900-2121-01 Smart Plus 3.00.0.1.2.0 ASM Epsilon 3200 used working

Nor-Cal Products ESVP-1002-NWB-S?A Right Angle Valve ASM Epsilon 3200 used works

ASM Epsilon 3200 Wafer Transfer Module Temperature Control Panel used working

VAT 02112-AE24-AAJ1 Slit Valve ASM Epsilon 3200 Wafer Transfer Module used works

Genmark 9800109111 System Controller Large ASM Epsilon 3200 used working

NTI Nodemux KVM Switch ST-4U-TS-NBS-12?V ASM Epsilon 3200 used working

Genmark EL2 Wafer Cassette Robot ASM Epsilon 3200 Wafer Transfer Module working

Hitachi L300P-150HFU2 Inverter 15kW 20HP 380-480V ASM Epsilon 3200 used working

ASM Epsilon 3200 Wafer Transfer Module untested sold as is

ASM Epsilon 3200 Process & Gas Module used untested sold as-is